New miniaturised EPCOS MEMS pressure sensor dies have been announced by TDK. The automotive versions of the C33 series have dimensions of 1x1x0.4mm, making them what the company claims to be one of the smallest of their kind. They are designed for absolute pressures of 1.2-10 bar, and are qualified based on AEC-Q101. The typical operating voltage is 3V. With a supply voltage of 5V they offer sensitivities of between 15-80mV/bar, depending on the type.
The miniaturised pressure sensors are suitable for a temperature range from -40 to 135°C and can even withstand 140°C for short periods. They also offer a very long-term stability of ±0.35% FS (full scale).
The C39 type, with its footprint of 0.65x0.65mm is especially suitable for IoT and consumer applications. One noteworthy feature of the C39 is its low insertion height of just 0.24mm, which makes the low-profile MEMS pressure sensor die suitable for applications in smartphones and wearables, for example, where space requirements are critical.
The C39 is designed for an absolute pressure of 1.2 bar and, like the C33 series, offers long-term stability of ±0.35% FS. All the pressure sensor dies operate on the piezoresistive principle and deliver, via a Wheatstone bridge, an analogue signal that is proportional to the applied pressure and the supply voltage.